Introduction to Microsystems

MEMS 101 focus is:

"This course will introduce Microelectromechanical Systems construction and their use in systems today. Experiments will be used throughout this course that introduces the methods used to construct MEMS devices with the various process steps. Theories and practices associated with the construction and use of sensor, actuators and transducers will be discussed. Process steps in the creation of MEMS devices will be discussed as well as the use of cleanrooms and cleanroom equipment and processes."- Ivy Tech website

MEMS 101 Lab Notebook